Influence of polymerization among Al- and Ga-containing molecules on growth rate and Al content in AlGaN
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The paper entitled “Influence of polymerization among Al- and Ga-containing molecules on growth rate and Al content in AlGaN” indicates the AlGaN growth mechanism. AlGaN is one of key materials for light-emitters and electronic devices.
Journal of Crystal Growth 516, pp.17–20 (2019). DOI: 10.1016/j.jcrysgro.2019.03.023